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Valiev, Kamil A ListingsIf you cannot find what you want on this page, then please use our search feature to search all our listings. Click on Title to view full description
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Valiev, Kamil A The Physics Of Submicron Lithography
Plenum Press, New York 1992 1st edition.
Laminated boards, F. xii+493pp, text figs, index, a fine copy, as new. Standard text on the physics of electron beam, ion beam, optical & x ray lithography. The book is intended for specialists who are developing or using methods of processing materials into a device whose components are submicron in size.
Price:
85.00 GBP
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